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SEMI E113-1104 (technical revision)
The guide will provide criteria and common baselines of the middle-end process for related upstream and downstream manufacturers in fabricating 3DS-IC products
and 3D viewing angle are included in this Document
2 The piping distribution Subordinate Standards (SEMI E49
SEMI E40-0813 (designation update)
E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment StdPbc-0622 SEMI E113-1104 (technical revision)The purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment. It is a guide for establishing electrostatic compatibility of equipment used in semiconductor manufacturing. Electrostatic compatibility in the entire semiconductor factory is addressed in SEMI E129. Electrostatic surface charge causes a number of undesirable effects in semiconductor